JPS6414906U - - Google Patents

Info

Publication number
JPS6414906U
JPS6414906U JP11050387U JP11050387U JPS6414906U JP S6414906 U JPS6414906 U JP S6414906U JP 11050387 U JP11050387 U JP 11050387U JP 11050387 U JP11050387 U JP 11050387U JP S6414906 U JPS6414906 U JP S6414906U
Authority
JP
Japan
Prior art keywords
diaphragm chamber
diaphragm
pneumatic actuator
communicated
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11050387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11050387U priority Critical patent/JPS6414906U/ja
Publication of JPS6414906U publication Critical patent/JPS6414906U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP11050387U 1987-07-17 1987-07-17 Pending JPS6414906U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11050387U JPS6414906U (en]) 1987-07-17 1987-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11050387U JPS6414906U (en]) 1987-07-17 1987-07-17

Publications (1)

Publication Number Publication Date
JPS6414906U true JPS6414906U (en]) 1989-01-25

Family

ID=31347724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11050387U Pending JPS6414906U (en]) 1987-07-17 1987-07-17

Country Status (1)

Country Link
JP (1) JPS6414906U (en])

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